Swiss sensor manufacturer Sensirion is launching a flow
sensor for flow rates below 2 cc/sec (120 ml/min) with hydrocarbon-based
liquids such as photoresists and solvents. Designed for use in high-purity fluid
handling applications in the semiconductor, PV and flat panel display
industries, the new SLQ-QT105 sensor features a short measurement response time
of approximately 40 ms and very high sensitivity for flow rates down to 0.05
cc/sec (3 ml/min). Detection of air bubbles in the microliter range is also
possible.
Flow is measured without moving parts and non-invasively
through the wall of a straight flow path. All wetted materials are made from
Teflon® or quartz glass. The compact, lightweight device is equipped with
fittings for 4x3mm PFA tubing. A smart digital interface and robust RS485
communication is offered for long distance and bus capability.
According to product manager Jonas Horn, the SLQ-QT105 opens
new perspectives for high-purity process control by remedying the shortage of
precise, reliable, fast and inexpensive sensors for flow rates in the low
milliliter range. Mechanical solutions, such as small paddlewheels and
ultrasonic flow meters, are often unable to fulfill requirements due to their
slow response, problems with bubbles, and inability to measure flow rates below
100 ml/min repeatably. With the SLQ-QT105, the advantages of CMOSens® Technology
are now available for the first time for use in high-end semiconductor
applications.
