Reno Sub-Systems, producer of high-performance radio frequency (RF) matching networks, RF power generators and gas flow management systems for semiconductor manufacturing, today announced from SEMICON West the latest addition to its Precis™ Solid-State Generator portfolio. Capable of 1.6kW microwave output at 2.45GHz, the new Precis generator offers the highest-power solid-state microwave generator available for semiconductor […]
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