Full-field projection exposure system “UX4-LEDs” for manufacturing led chips
1 Full-field Projection Exposure Up to 6-inch Wafers
· Requires no contact between the mask and wafer, thus avoiding potential damage to both and preventing any defect on a circuit pattern.
· Requires neither mask replacement nor cleaning that would cause system downtime.
· Allows full-field exposure to enhance throughput (300% higher than that of conventional stepper systems)
2 High Overlay Accuracy and High Resolution
· USHIO originally developed the projection lens and the alignment and wafer transfer mechanism optimized for manufacturing LEDs.
· Allows enhancement of detection accuracy of alignment marks with low visibility, such as those for transparent electrodes, to achieve high overlay accuracy.
· Original wafer chucking method for eliminating warpage or distortion of wafers, and a projection lens with a deep depth of focus minimize variation in line width.
3 Flexible System Design
· Designed to automatically handle wafer size conversions so as to allow an increase in wafer size without changing system settings or replacing parts, thus requiring no downtime.
· Use of modular structure for major system components allows easy specification changes or upgrading as well as easy maintenance.
4 High Cost-Benefit Performance
· Designed specifically for LED manufacturing to greatly reduce the initial cost compared with use of a semiconductor stepper system for manufacturing LEDs.
· Running cost is reduced by 80% of the conventional stepper systems to lower the cost of ownership (CoO).
· The footprint reduced by 50% or more from the conventional UX series to achieve 3.0 m2 or less.
About USHIO AMERICA, INC.
USHIO AMERICA, INC., is a leading provider of specialty and general Illumination lighting solutions. Based in Cypress, California, and established in 1967 as a subsidiary of USHIO Inc. (Tokyo, Japan), USHIO America now carries over 3,500 general lighting and specialty products. These Lighting-Edge Technologies™ are provided for a variety of industries, such as general illumination, audio-visual, photographic, stage, studio and television, semiconductors, LEDs, FPDs, printed-circuit boards, video projection, cinema, UV curing, germicidal, horticulture, graphic arts, flashlights, scientific, medical, dental, ophthalmic, infra-red heating, and many others. For further information, visit www.ushio.com.
About USHIO INC.
Established in 1964, USHIO has handled a number of discharge lamps for exposure systems, cinema projectors, data projectors, and other equipment, in addition to halogen lamps used with lighting and office automation equipment. USHIO also manufactures and sells optical devices assembled with its own lamps, and many of these products have obtained a leading position. The number of employees, including those working with overseas consolidated subsidiaries, is about 4,700 and consolidated sales amounted to 119.0 billion yen. (The figures are those for the March 2009 term; figures have been rounded down to the nearest 100 million yen.) https://www.ushio.co.jp