Aerotech’s AVS1000 series stages offer the ideal solution
for applications that require positioning of large or heavy loads over very
small incremental movements in elevation above a horizontal plane. The low
profile and precise motion capability make these stages ideal for use in
semiconductor manufacturing and inspection, automated tool alignment, machine
vision inspection systems, laser machining applications, and more.
The AVS1000 series provides precise elevation of a load in a
vertical plane using a moving-wedge design. The precision machined wedge block
converts horizontal movement from a precision-ground ball screw into vertical
elevation of the AVS1000 series tabletop. Excellent pitch and yaw
characteristics over the length of travel minimize the impact of angular
errors. AVS1000 performance includes exceptional resolution (5 nm) and accuracy
(±1 µm), with the ability to apply this performance to large loads up to 135 kg.
Sealed linear motion guide bearings with integral wipers are
incorporated to provide excellent payload capability, long life, and smooth,
precision motion. Stable and parallel vertical motion with no rocking or
horizontal deviation of the platform is assured. Careful design of the wedge
angle and bearing system allows the AVS1000 series to achieve submicron
resolution and still maintain a compact profile.
The vertical lift approach offers an alternative to
traditional Z-plane oriented stages. Not only do the AVS1000 series stages
offer a lower profile, but the load can also be conveniently accessed from any
side due to the large aperture. And by centering the payload over the bearings,
there are no cantilevering effects.
The AVS1000 series includes Aerotech’s high performance NEMA
34 frame-size BMS series brushless, slotless servomotor. The slotless motor has
zero cogging and therefore is optimized for applications requiring very smooth